E344 Thin Film Technology
This module covers the properties of different thin film materials, as well as the growth and fabrication methodology. It lays a foundation in nanotechnology and equips students with a comprehensive understanding of nano-sized materials and their applications. It will also cover advanced thin film applications in emerging devices such as Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS).
Students will develop practical skillsets that include fundamental vacuum principles and requirements for thin film deposition, as well as an understanding of nanotechnology that is widely employed in areas such as engineering and applied science.
