Introduction to Vacuum and Plasma Technology

Ever wondered how vacuum and plasma systems work?

Find out for yourself through this introductory course where you will learn about vacuum and plasma technology commonly applied in the semiconductor, electronic, and manufacturing industries. The knowledge and skills gained through this course can be applied to optical coating, IC chip fabrication, 5G, Internet of Things, and more!

Participants will also get the opportunity to participate in hands-on sessions using the MKS training system. This will allow for a better grasp of the working principles and applications of vacuum and plasma technology for processes such as thin film deposition and wafer fabrication.

Learning Objectives

By the end of the course, participants will be able to

  • provide explanation on vacuum and plasma, their benefits, and applications in the manufacturing industry

  • understand the working principles of vacuum and plasma technology

  • operate and calibrate vacuum systems, both hardware and software

  • deposit copper thin film using MKS sputtering training system

Who Should Attend?

Engineering and technical personnel interested in understanding the vacuum and plasma systems.

Entry Requirement

Participants are expected to be familiar with the general operation of a personal computer (PC) or Macintosh (MAC), such as browsing the internet, opening, and saving files, etc.


Participants will be awarded the Certificate of Attendance by Republic Polytechnic upon meeting 80% of the attendance requirement.

Trainer's Profile

Dr. Yang Hong is a senior lecturer at Republic Polytechnic’s (RP) School of Engineering under the Diploma in Electrical and Electronics Engineering. She joined RP in 2008 and has since developed the Wafer Fabrication and Packaging module and served as a module chair for Thin Film Technology.

Between 1998 to 2005, Dr. Yang was a research staff under the school of Electrical & Electronics Engineering at Nanyang Technological University, Singapore. There, she focused on fabrication and characterisation of various micro-devices. She also worked on the development of semiconductor thin films. Besides that, she served as a Process Integration Senior Engineer under a research and development department at Chartered Semiconductor Manufacturing Limited for two years, prior to joining RP.

Course Dates

Click “APPLY NOW” to check available course dates and to register.

Course Duration

1 day (8 hours, with breaks)

Course Venue

RP ACE @ Woodlands

Full Course Fees 

Singapore Citizens aged 40 & above

SME-sponsored Singapore Citizens OR Singapore PR

Singapore Citizens aged 39 & below OR Singapore PR





• Payment may be made using SkillsFuture Credit.
• Fees reflected are inclusive of Goods and Services Tax (GST).
• From 1 July 2020, Workfare Training Scheme (WTS) and fee subsidy under WTS will cease. WTS will be replaced by Workfare Skills Support Scheme (WSS). For more information on WSS, please refer to
Republic Polytechnic reserves the right to make changes to the course fee and application closing dates without prior notice. The commencement of each course is subject to sufficient number of participants. 
All information is accurate at time of publishing. 
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Last updated on 26 Apr 2022

Need more help?

If you are still unsure about which course to pursue, please contact our Academy for Continuing Education.  

Fees quoted are inclusive of GST. Republic Polytechnic reserves the right to make changes to the course fees and application closing dates without prior notice. The commencement of each course is subject to a sufficient number of participants. All information is accurate at time of publishing.