This module allows students to develop a good understanding of the thin film technologies that are widely used in the semiconductor industry. It covers the properties of different thin film materials as well as the growth and fabrication methodology. This module also lays a foundation in nanotechnology and equips students with a good understanding of nano-sized materials and its applications. It will also cover advanced thin film applications in emerging industries like Micro-Electro- Mechanical Systems (MEMS), Nano-Electro-Mechanical Systems (NEMS), and thin film in Internet of Things (IoT). Students will be taught practical skillsets which include fundamental vacuum principles and requirements for thin film deposition, as well as foundation in nanotechnology that is widely employed in areas such as engineering and applied science.