School of Engineering Cleanroom
The School of Engineering cleanroom is a Class 100 & 1000 certified cleanroom fully equipped with supporting facilities such as Fan Filter Unit (FFU) with HEPA filters, de-Ionized water system and process cooling water system to support curriculum, project development and research work in the area of microelectronics under Diploma in Electrical and Electronic Engineering (DEEE).
The cleanroom houses various semiconductor processing tools such as Physical Vapour Deposition (PVD), Chemical Vapour Deposition (CVD), Rapid Thermal Processing (RTP) system, photolithograpy, wet benches for chemical process and various measurement & imaging tools including Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), ellipsometer, surface profiler and 4 point probe.